- The combination of a laser beam delivered by a water jet to perform deep etching in silicon for MEMS applications
- Recent developments in experimental on-chip stiction research: a review
- Thin film shape memory alloys and microactuators
- A review of silicon carbide development in MEMS applications
- Advancement of micro/nanotechnology research in Institute of Precision Engineering of Xi'an Jiaotong University
- Low stress nanoporous SiNx membrane for cell culture
- Design and fabrication of a microgripper with a topology optimal compliant mechanism
- Modelling and simulations of DRIE including a footing effect
- Process development support environment: a tool suite to engineer manufacturing sequences
- Indentation on very smooth silicon wafers
- Nanomechanical characterisation of MEMS thin film materials
5 August 2009
Special issue: Microelectromechanical systems
International Journal of Computational Materials Science and Surface Engineering 2(3/4) 2009
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