3 January 2012

Special issue: Precision micro- and nano-metrology for nanomanufacturing

International Journal of Nanomanufacturing 8(1/2) 2012
  • Nanometrology at PTB in support of process control of nanoscale features in semiconductor manufacturing
  • Improvement of free-spectral-range measurement for Fabry-Perot cavity using phase modulation technique
  • GPU-accelerated white-light scanning interferometer for large-area, high-speed surface profile measurements
  • In-situ scanning white light interferometry employing dual-sensing configuration and active fringe-locking strategy
  • Development of nanoparticle sizing system integrated with optical microscopy using fluorescence polarisation
  • The system and the mechatronics of a pagoda type micro-CMM
  • Fabrication of micro-ball styluses for scanning-type surface form metrology
  • Establishment of a measuring station on a diamond turning machine for in-process cutting edge inspection of single point diamond micro-tools
  • Nanomanufacturing of radial grating patterns by nanoimprint with a silicon mould for rotational angle measurement of micro gears
  • A study of characterisation of surface generation in ultra-precision polishing using power spectrum analysis Probe type micro magnetic manipulator utilising localised magnetic field with closed-loop magnetic path

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