Special issue: Precision micro- and nano-metrology for nanomanufacturing

International Journal of Nanomanufacturing 8(1/2) 2012

• Nanometrology at PTB in support of process control of nanoscale features in semiconductor manufacturing
• Improvement of free-spectral-range measurement for Fabry-Perot cavity using phase modulation technique
• GPU-accelerated white-light scanning interferometer for large-area, high-speed surface profile measurements
• In-situ scanning white light interferometry employing dual-sensing configuration and active fringe-locking strategy
• Development of nanoparticle sizing system integrated with optical microscopy using fluorescence polarisation
• The system and the mechatronics of a pagoda type micro-CMM
• Fabrication of micro-ball styluses for scanning-type surface form metrology
• Establishment of a measuring station on a diamond turning machine for in-process cutting edge inspection of single point diamond micro-tools
• Nanomanufacturing of radial grating patterns by nanoimprint with a silicon mould for rotational angle measurement of micro gears
• A study of characterisation of surface generation in ultra-precision polishing using power spectrum analysis Probe type micro magnetic manipulator utilising localised magnetic field with closed-loop magnetic path