International Journal of Nanomanufacturing special issue: "Precision Metrology for Micro- and Nanomanufacturing"

International Journal of Nanomanufacturing 8(5/6) 2012

• Characterisation of structured geometry surface features on micro and nano scale surfaces
• Quantitative characterisation of nanoimprinted structures using metrological large range AFM and CDAFM
• Towards fast AFM-based nanometrology and nanomanufacturing
• Height measurement of single nanoparticles based on evanescent field modulation
• Real-time absolute distance measurement by comb-based generation of multiple wavelengths
• Micro and nano coordinate measuring technology with optical and tactile optical probes in high precision coordinate measuring machines
• Aspects of micro-tactile dynamic sensor tracking
• Surface and coordinate measurements with nanomeasuring machines
• Scattered light sensor for chatter mark detection in nanometer scale
• Assessment of machining with uncoated and coated end mills and determining surface topography using 2D fast Fourier transform
• Evaluation of optical heterogeneity using phase-shift digital holography